Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/24/1996
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Application #:
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08317332
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Filing Dt:
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10/04/1994
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Inventors:
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DAVID J. ELLIOTT, RICHARD F. HOLLMAN, DAVID SHAFER
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Title:
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DEEP ULTRAVIOLET OPTICAL IMAGING SYSTEM FOR MICROLITHOGRAPHY AND/OR MICROFABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 526 BOSTON POST ROAD |
| WAYLAND,, MASSACHUSETTS 01778 |
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| WILLIS M. ERTMAN |
| FISH & RICHARDSON |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110-2804 |
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