Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/18/1997
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Application #:
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08521958
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Filing Dt:
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08/31/1995
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Inventors:
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MATTHEW M. BESEN, LAWRENCE BOURGET, WILLIAM M. HOLBER, DONALD K. SMITH, RICHARD S. POST
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Title:
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MICROWAVE PLASMA DEPOSITION SOURCE AND METHOD OF FILLING HIGH ASPECT-RATIO FEATURES ON A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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| PATENT ADMINISTRATOR |
| PROSKAUER ROSE LLP |
| ONE INTERNATIONAL PLACE |
| BOSTON, MA 02110-2600 |
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