Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/13/1998
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Application #:
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08497960
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Filing Dt:
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07/03/1995
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Inventor:
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MANOOCHER BIRANG
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Title:
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APPARATUS AND METHOD FOR DETECTING SURFACE ROUGHNESS IN A CHEMICAL POLISHING PAD CONTIONING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT, M/S #2634 |
3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
CHARLES S. GUENZER |
LEGAL AFFAIRS DEPT. |
3050 BOWERS AVE. M/S 2634 |
SANTA CLARA, CA 95054 |
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