Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/28/1998
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Application #:
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08574501
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Filing Dt:
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12/19/1995
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Inventors:
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MANOOCHER BIRANG, JOHN PRINCE
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Title:
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APPARATUS AND METHOD TO DETERMINE THE COEFFICIENT OF FRICTION OF A CHEMICAL MECHANICAL POLISHING PAD DURING A PAD CONDITIONING PROCESS AND TO USE IT TO CONTROL THE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL MS/2061, P.O. BOX 450A |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL MS/2061 |
| 3050 BOWERS AVE. |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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