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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/15/1998
Application #:
08821353
Filing Dt:
03/20/1997
Inventors:
CHAO-CHENG CHEN, CHIA-SHIUNG TSAI, CHEN-HUA YU
Title:
METHOD FOR FORMING A SHALLOW TRENCH WITH TAPERED PROFILE AND ROUND CORNERS FOR THE APPLICATION OF SHALLOW TRENCH ISOLATION (STI)
Assignment: 1
Reel/Frame:
008482/0594Recorded: 03/20/1997Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/24/1997
Exec Dt:
01/24/1997
Exec Dt:
01/24/1997
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
NO. 9, CREATION ROAD. 1
HSINCHU, TAIWAN R.O.C
Correspondent:
PENNIE & EDMONDS LLP
NANDA K. ALAPATI
1667 K STREET, N.W.
WASHINGTON, D.C. 20006

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