Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/1998
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Application #:
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08635874
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Filing Dt:
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04/18/1996
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Inventors:
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MITSUHIRO SAKAI, KIYOHISA TATEYAMA
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Title:
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METHOD OF PROCESSING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6 AKASAKA 5-CHOME |
| TOKYO 107, JAPAN |
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| OBLON, SPIVAK, MCLELLAND, MAIER |
| & NEUSTADT, P.C. - MARVIN J. SPIVAK |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VIRGINIA 22202 |
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