Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/30/1999
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Application #:
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08626789
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Filing Dt:
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04/02/1996
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Inventors:
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SALVADOR P. UMOTOY, ALAN F. MORRISON, KARL A. LITTAU, RICHARD A. MARSH et al
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Title:
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HEATER WITH SHADOW RING AND PURGE ABOVE WAFER SURFACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| 3050 BOWERS AVENUE |
| SANTA CLARA,, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| MICHAEL B. EINCHSLAG |
| 3050 BOWERS AVE. M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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