Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08964772
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Filing Dt:
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11/05/1997
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Inventor:
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HUEY-MING TZENG
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Title:
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IN-SITU MONITORING OF POLISHING PAD WEAR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 830 STEWART DRIVE |
| SUNNYVALE, CALIFORNIA 94086 |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL. |
| DAVID T. MILLERS |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 1, CREATION ROAD 1 |
| HSINCHU, TAIWAN |
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| SKJERVEN MORRILL MACPHERSON LLP |
| ROBERTA P. SAXON |
| 25 METRO DRIVE |
| SUITE 700 |
| SAN JOSE, CA 95510 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3F, NO.19, LI-HSIN ROAD |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU CITY, TAIWAN |
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| MACPHERSON KWOK CHEN ET.AL. |
| MICHAEL SHENKER |
| 1762 TECHNOLOGY DRIVE, SUITE 226 |
| SAN JOSE, CA 95110 |
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