Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/11/2000
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Application #:
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09035573
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Filing Dt:
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02/26/1998
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Inventors:
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DAVID W. WEYBURNE, QING S. PADUANO
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Title:
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PROCESS FOR MEASURING THE THICKNESS AND COMPOSITION OF THIN SEMICONDUCTOR FILMS DEPOSITED ON SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ESC/JAZ |
| 40 WRIGHT STREET |
| HANSCOM AFB, MASSACHUSETTS 01731 |
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| JULIAN L. SIEGEL |
| 40 WRIGHT STREET |
| ESC/JAZ |
| HANSCOM AFB, MA 01731-2903 |
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