Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09048848
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Filing Dt:
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03/26/1998
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Inventors:
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GOTTLIEB S. OEHRLEIN, BERND KASTENMEIER, PETER MATSUO
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Title:
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HIGHLY SELECTIVE CHEMICAL DRY ETCHING OF SILICON NITRIDE OVER SILICON AND SILICON DIOXIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 9 |
| ALBANY, NEW YORK 12201 |
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| HESLIN & ROTHENBERG |
| KEVIN P. RADIGAN |
| 5 COLUMBIA CIRCLE |
| ALBANY, NY 12203 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POST OFFICE BOX 9 |
| ALBANY, NEW YORK 12201 |
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| HESLIN & ROTHENBERG, P.C. |
| KEVIN P. RADIGAN, ESQ. |
| 5 COLUMBIA CIRCLE |
| ALBANY, NY 12203 |
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