Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/21/2001
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Application #:
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09407628
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Filing Dt:
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09/28/1999
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Inventors:
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WILLIAM H. MULLEE, MARC DE LEEUWE, GLENN A. ROBERSON JR.
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Title:
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REMOVAL OF CMP RESIDUE FROM SEMICONDUCTORS USING SUPERCRITICAL CARBON DIOXIDE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4160A TECH DRIVE |
| FREMONT, CALIFORNIA 94538 |
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| HAVERSTOCK & OWENS LLP |
| THOMES B. HAVERSTOCK |
| 260 SHERIDAN AVE, STE. 420 |
| PALO ALTO, CA 94306 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| AKASAKA 5-CHOME |
| TOKYO 107-8481, JAPAN |
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| HAVERSTOCK & OWENS LLP |
| THOMAS B. HAVERSTOCK |
| 260 SHERIDAN AVENUE, SUITE 420 |
| PALO ALTO, CALIFORNIA 94306 |
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