Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09465700
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Filing Dt:
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12/17/1999
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Inventors:
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TONG-HUA KUAN, HUI-LING WANG, YING-LANG WANG, CHIN-KUN LAN
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Title:
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METHOD FOR IMPROVEMENT OF TUNGSTEN CHEMICAL-MECHANICAL POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 9, CREATION ROAD 1, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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| LOWE HAUPTMAN GOPSTEIN GILMAN & BERNER |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL ROAD, SUITE 310 |
| ALEXANDRIA, VA 22314 |
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