Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/25/2001
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Application #:
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09557695
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Filing Dt:
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04/25/2000
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Inventors:
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Steven T. Mayer, John B. Alexy, Jinbin Feng
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Title:
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Etchant mixing system for edge bevel removal of copper from silicon wafers
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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BEYER WEAVER & THOMAS, LLP |
JEFFREY K. WEAVER |
P.O. BOX 130 |
MOUNTAIN VIEW, CA 94042-0130 |
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