Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09296177
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Filing Dt:
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04/22/1999
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Inventors:
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HSUEH-CHUNG CHEN, MING-SHENG YANG, JUAN-YUAN WU, WATER LUR
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Title:
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METHOD FOR IMPROVING NON-UNIFORMITY OF CHEMICAL MECHANICAL POLISHING BY OVER COATING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN RD 2 |
| HSIN-CHU CITY, TAIWAN R.O.C |
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| HARNESS, DICKEY & PIERCE ,PLC. |
| THOMAS T. MOGA |
| PO BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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