Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/12/2002
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Application #:
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09803503
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Filing Dt:
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03/09/2001
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Inventors:
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Douglas A. Buchanan, Evgeni P. Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank et al
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Title:
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APPARATUS AND METHOD FOR FORMING AN OXYNITRIDE INSULATING LAYER ON A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| DELIO & PETERSON, LLC |
| WILLIAM D. SABO, ESQ. |
| 121 WHITNEY AVENUE |
| NEW HAVEN, CT 06510-1241 |
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