Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09641461
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Filing Dt:
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08/18/2000
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Inventors:
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Stewart K. Griffiths, Robert H. Nilson, Brad S. Mattson, Stephen E. Savas
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Title:
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Method and apparatus for thermal processing of semiconductor substrates
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7011 EAST AVENUE |
| LIVERMORE, CALIFORNIA 94550 |
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| 3550 WEST WARREN AVENUE |
| FREMONT, CALIFORNIA 94538 |
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| WILSON SONSINI GOODRICH & ROSATI |
| MICHAEL J. MURPHY |
| SR 1-2 |
| 650 PAGE MILL ROAD |
| PALO ALTO, CA 94304-1050 |
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Assignment:
2
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2010 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95131 |
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| GREENE RADOVSKY, ET AL. |
| RUSSELL D. POLLOCK, ESQ. |
| FOUR EMBARCADERO CENTER, SUITE 4000 |
| SAN FRANCISCO, CA 94111 |
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Assignment:
3
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| 6111 NORTH RIVER ROAD |
| ROSEMONT, ILLINOIS 60018 |
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| MURPHY SHENEMAN JULIAN & ROGERS |
| BRYAN SNYDER |
| 2049 CENTURY PARK EAST |
| SUITE 2100 |
| LOS ANGELES, CA 90067 |
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