Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09318474
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Filing Dt:
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05/25/1999
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Publication #:
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Pub Dt:
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11/01/2001
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Inventors:
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MARK RICHARD TESAURO, PETER D. NUNAN
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Title:
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HARD MASK FOR COPPER PLASMA ETCH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1310 ELECTRONICS DRIVE |
| CARROLLTON, TEXAS 75006 |
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| FELSMAN, BRADLEY, VADEN, ET AL. |
| MATTHEW S. ANDERSON |
| 201 MAIN STREET |
| SUITE 1600 |
| FORT WORTH, TX 76102 |
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