Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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08777906
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Filing Dt:
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12/31/1996
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Inventors:
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DANIEL F. KENNEDY, VICTOR BELITSKY, ARUL SHANMUGASUNDRAM
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Title:
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METHOD AND APPARATUS FOR AUTOMATICALLY CHANGING A POLISHING PAD IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| DAVID J. GOREN - LEGAL AFFAIRS DEPT. |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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