Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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08955181
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Filing Dt:
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10/21/1997
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Inventors:
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GERALD ZHEYAO YIN, XUE-YU QIAN, PATRICK L LEAHEY, JONATHAN D MOHN, WAICHING CHOW et al
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Title:
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TREATMENT OF ETCHING CHAMBERS USING ACTIVATED CLEANING GAS
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT |
3050 BOWERS AVENUE, MAIL STOP 2061 |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
PATENT COUNSEL |
LEGAL AFFAIRS DEPARTMENT |
P.O.BOX 450A |
SANTA CLARA, CA 95052 |
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