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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/14/2002
Application #:
09555819
Filing Dt:
07/28/2000
Inventors:
WILLI NEFF, RAINER LEBERT, GUIDO SCHRIEVER, KLAUS BERGMANN
Title:
METHOD AND DEVICE FOR PRODUCING EXTREME ULTRAVIOLET AND SOFT X-RAYS FROM A GASEOUS DISCHARGE
Assignment: 1
Reel/Frame:
010983/0430Recorded: 07/28/2000Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/06/2000
Exec Dt:
06/06/2000
Exec Dt:
06/08/2000
Exec Dt:
06/07/2000
Assignee:
LEONRODSTRASSE 54
80636 MUENCHEN, GERMANY
Correspondent:
EVENSON, MCKEOWN, EDWARDS ET AL
DONALD D. EVENSON
1200 G STREET, N.W., SUITE 700
WASHINGTON, D.C. 20005

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