Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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10140662
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Filing Dt:
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05/08/2002
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Inventors:
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Tao Cheng, Wen-Hsin Huang, Jiun-Pyng You, Lin-June Wu, Shih-Tzung Chang, Ming-Jei Lee et al
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Title:
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USE OF A CAPPING LAYER TO REDUCE PARTICLE EVOLUTION DURING SPUTTER PRE-CLEAN PROCEDURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVE. 3 |
HSIN-CHU, TAIWAN R.O.C |
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GEORGE O. SAILE |
STEPHEN B. ACKERMAN |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE SPELLING OF THE SIXTH AND NINTH ASSIGNOR'S PREVIOUSLY RECORDED ON REEL 012892 FRAME 0783. (ASSIGNOR HEREBY CONFIRMS THE ASSIGNMENT OF THE ENTIRE INTEREST)
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121 PARK AVE. 3 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN R.O.C. |
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GEORGE O. SAILE |
28 DAVIS AVENUE |
POUGHKEEPSIE, NY 12603 |
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05/23/2024 12:22 PM
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