Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09449533
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Filing Dt:
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11/29/1999
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Inventors:
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HSUEH-CHUNG CHEN, CHIEN-HUNG CHEN, JUAN-YUAN WU
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Title:
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METHOD FOR MONITORING A SEMICONDUCTOR WAFER IN A CHEMICAL MECHANICAL POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN ROAD 2 |
| HSIN-CHU, TAIWAN R.O.C |
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| WINSTON HSU |
| 3F, NO. 52, LANE 46, MIN-SHENG RD. |
| YUNG-HO CITY |
| TAIPEI HSIEN, TAIWAN R.O.C. |
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