Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09808210
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Filing Dt:
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03/13/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Inventor:
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Michael Sogard
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Title:
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GAS COOLED ELECTROSTATIC PIN CHUCK FOR VACUUM APPLICATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SHINAGAWA-KU |
| 6-3 NISHI-OHI, 1-CHROME |
| TOKYO 140, JAPAN |
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| LIU & LIU LLP |
| WEN LIU |
| 811 WEST 7TH STREET, SUITE 1100 |
| LOS ANGELES, CA 90017 |
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