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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/21/2003
Application #:
09219945
Filing Dt:
12/23/1998
Publication #:
Pub Dt:
02/13/2003
Inventors:
CHRISTOPHER BENCHER, JOE FENG, MEI-YEE SHEK, CHRIS NGAI, JUDY HUANG
Title:
SILICON CARBIDE DEPOSITION FOR USE AS A LOW-DIELECTRIC CONSTANT ANTI-REFLECTIVE COATING
Assignment: 1
Reel/Frame:
009794/0024Recorded: 02/24/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/08/1999
Exec Dt:
01/12/1999
Exec Dt:
01/12/1999
Exec Dt:
01/06/1999
Exec Dt:
01/12/1999
Assignee:
LEGAL AFFAIRS DEPARTMENT
P.O. BOX 450A, M/S #2061
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT V. MULCAHY
PATENT COUNSEL
LEGAL AFFAIRS DEPT., P.O. BOX 450A
SANTA CLARA, CA 95052

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