Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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09930938
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Filing Dt:
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08/16/2001
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Publication #:
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Pub Dt:
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02/20/2003
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Inventors:
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Arnold V. Kholodenko, Dan Katz, Wing L. Cheng
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Title:
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PROCESS CHAMBER HAVING MULTIPLE GAS DISTRIBUTORS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT, MAIL STOP 2061 |
P.O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
PATENT COUNSEL |
LEGAL AFFAIRS DEPARTMENT, M/S 2061 |
P.O. BOX 450A |
SANTA CLARA, CA 95052 |
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