Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
03/09/2004
|
Application #:
|
10060282
|
Filing Dt:
|
01/30/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/02/2003
| | | | |
|
Inventor:
|
Jorg Schultz
|
|
Title:
|
CONTROL OF A DISTRIBUTION OF ILLUMINATION IN AN EXIT PUPIL OF AN EUV ILLUMINATION SYSTEM
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
|
|
|
|
| OHLANDT, GREELEY, RUGGIERO & PERLE, LLP |
| CHARLES N.J. RUGGIERO, ESQ. |
| ONE LANDMARK SQUARE, 10TH FLOOR |
| STAMFORD, CONNECTICUT 06901-2682 |
|
|
Search Results as of:
05/29/2024 07:11 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
