Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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10412939
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Filing Dt:
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04/14/2003
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Publication #:
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Pub Dt:
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11/06/2003
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Inventors:
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Ivo Raaijmakers, Franciscus B. Van Bilsen
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Title:
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CLEANING OF SEMICONDUCTOR PROCESSING CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3440 EAST UNIVERSITY DRIVE |
| PHOENIX, ARIZONA 85034-7200 |
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| GREENLEE, WINNER AND SULLIVAN |
| TAMALA R. JONAS |
| 5370 MANHATTAN CIRCLE, SUITE 201 |
| BOULDER, COLORADO 80303 |
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