Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10085698
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Filing Dt:
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02/28/2002
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Inventors:
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Gregory H. Bogush, Jeffrey P. Chamberlain, Paul M. Feeney, Brian L. Mueller et al
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Title:
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PREEQUILIBRIUM POLISHING METHOD AND SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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870 NORTH COMMONS DRIVE |
AURORA, ILLINOIS 60504 |
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CABOT MICROELECTRONICS CORPORATION |
PHYLLIS T. TURNER-BRIM |
ASSOCIATE GENERAL COUNSEL, INTEL. PROP. |
870 N. COMMONS DRIVE |
AURORA, IL 60504 |
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