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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/11/2004
Application #:
09891699
Filing Dt:
06/26/2001
Publication #:
Pub Dt:
08/08/2002
Inventors:
Bruce McArthur, Adlai Smith, Robert Hunter JR.
Title:
METHOD AND APPARATUS FOR SELF-REFERENCED WAFER STAGE POSITIONAL ERROR MAPPING
Assignment: 1
Reel/Frame:
012574/0126Recorded: 01/31/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/02/2001
Exec Dt:
08/06/2001
Exec Dt:
01/17/2002
Assignee:
6142 NANCY RIDGE DRIVE, SUITE 102
SAN DIEGO, CALIFORNIA 92121
Correspondent:
HELLER EHRMAN WHITE & MCAULIFFE LLP
DAVID A. HALL, ESQ.
4350 LA JOLLA VILLAGE DRIVE, 6TH FLOOR
SAN DIEGO, CA 92122-1246

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