Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09614785
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Filing Dt:
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07/12/2000
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Inventor:
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Dong-Il Cho
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Title:
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SILICON ETCHING APPARATUS USING XEF2
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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131-308, SEOUL NATIONAL UNIVERSITY SAN 56-1, SHILLIM-DONG, KWANAK-GU |
SEOUL, 151-742, KOREA, REPUBLIC OF |
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HEAD, JOHNSON & KACHIGIAN |
PAUL H. JOHNSON |
228 WEST 17TH PLACE |
TULSA, OKLAHOMA 74119 |
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