Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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09843563
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Filing Dt:
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04/26/2001
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Publication #:
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Pub Dt:
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10/31/2002
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Inventors:
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Mark A. Lucak, Richard D. Harris, Michael J. Knieser, Robert J. Kretschmann
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Title:
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METHOD FOR FABRICATING A MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE USING A PRE-PATTERNED SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1049 CAMINO DOS RIOS |
| THOUSAND OAKS, CALIFORNIA 91360 |
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| ROCKWELL AUTOMATION |
| JOHN J. HORN |
| 1201 S. SECOND ST., 8-T29 |
| MILWAUKEE, WI 53204 |
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