Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10655230
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Filing Dt:
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09/03/2003
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Publication #:
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Pub Dt:
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03/03/2005
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Inventors:
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M. Ziaul Karim, DongQing Li, Jeong Soo Byun, Thanh N. Pham
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Title:
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IN-SITU-ETCH-ASSISTED HDP DEPOSITION USING SIF4 AND HYDROGEN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPARTMENT |
P.O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
PATENT COUNSEL |
LEGAL AFFAIRS DEPARTMENT |
P.O. BOX 450A, M/S 2061 |
SANTA CLARA, CA 95052 |
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