Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/20/2005
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Application #:
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10749739
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Filing Dt:
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12/30/2003
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Publication #:
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Pub Dt:
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07/07/2005
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Inventors:
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Rex K. Frost, Swaminathan Sivakumar
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Title:
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SOLVENT VAPOR-ASSISTED PLASTICIZATION OF PHOTORESIST FILMS TO ACHIEVE CRITICAL DIMENSION REDUCTION DURING TEMPERATURE REFLOW
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BOULEVARD |
| SANTA CLARA, CALIFORNIA 95052 |
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| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP |
| MICHAEL A. BERNADICOU |
| 12400 WILSHIRE BOULEVARD |
| 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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