Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2006
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Application #:
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10423379
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Filing Dt:
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04/25/2003
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Publication #:
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Pub Dt:
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10/28/2004
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Inventors:
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Hsi-Kuei Cheng, Chu-Chang Chen, Ting-Chun Wang, Szu-An Wu, Hsien-Ping Feng et al
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Title:
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CHAMBER LEAKAGE DETECTION BY MEASUREMENT OF REFLECTIVITY OF OXIDIZED THIN FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121 PARK AVENUE 3 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C. 300 |
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| SLATER & MATSIL, LLP |
| KAY HOUSTON |
| 17950 PRESTON RD. |
| STE. 1000 |
| DALLAS, TX 75252-5793 |
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