Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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11043486
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Filing Dt:
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01/25/2005
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Publication #:
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Pub Dt:
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07/07/2005
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Inventor:
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Wallace T. Y. Tang
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Title:
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IN-SITU REAL-TIME MONITORING TECHNIQUE AND APPARATUS FOR ENDPOINT DETECTION OF THIN FILMS DURING CHEMICAL/MECHANICAL POLISHING PLANARIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| TIM H. PHAM |
| FISH & RICHARDSON P.C. |
| 500 ARGUELLO STREET, SUITE 500 |
| REDWOOD CITY, CALIFORNIA 94063 |
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