Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10917380
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Filing Dt:
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08/13/2004
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Publication #:
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Pub Dt:
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02/16/2006
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Inventors:
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Azat M. Latypov, Christopher J. Mason, Sherman K. Poultney, Arno J. Bleeker
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Title:
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SYSTEM AND METHOD TO COMPENSATE FOR STATIC AND DYNAMIC MISALIGNMENTS AND DEFORMATIONS IN A MASKLESS LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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| STERNE, KESSLER, GOLDSTEIN, ET AL. |
| C/O VIRGIL L. BEASTON |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 2005-3934 |
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