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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7151053
Issue Dt:
12/19/2006
Application #:
11118678
Filing Dt:
04/28/2005
Publication #:
20050233576
Pub Dt:
10/20/2005
Inventors:
Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Srinivas D. Nemani, Kangsub Yim et al
Title:
METHOD OF DEPOSITING DIELECTRIC MATERIALS INCLUDING OXYGEN-DOPED SILICON CARBIDE IN DAMASCENE APPLICATIONS
Assignment: 1
Reel/Frame:
016529/0830Recorded: 04/28/2005Pages: 35
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
LEE, JU-HYUNG
Exec Dt:
06/10/2002
XU, PING
Exec Dt:
10/08/2002
VENKATARAMAN, SHANKAR
Exec Dt:
06/24/2002
XIA, LI-QUN
Exec Dt:
06/10/2002
HAN, FEI
Exec Dt:
09/21/2002
YIEH, ELLIE
Exec Dt:
09/16/2002
NEMANI, SRINIVAS
Exec Dt:
06/10/2002
YIM, KANGSUB
Exec Dt:
06/10/2002
MOGHADAM, FARHAD K.
Exec Dt:
07/12/2002
SINHA, ASHOK K.
Exec Dt:
06/18/2002
ZHENG, YI
Exec Dt:
06/10/2002
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
PATENT COUNSEL
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS INC
PATENT COUNSEL
P.O. BOX 450-A
SANTA CLARA, CA 95052

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