Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/06/2007
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Application #:
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10195453
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Filing Dt:
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07/16/2002
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Publication #:
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Pub Dt:
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01/16/2003
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Inventors:
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Takehiko Orii, Tatsuya Nishida, Osamu Kuroda
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL, LLP |
| MICHAEL A. MAKUCH |
| 1850 M STREET NW-SUITE 800 |
| WASHINGTON, DC 20036 |
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