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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7463422
Issue Dt:
12/09/2008
Application #:
11657925
Filing Dt:
01/25/2007
Publication #:
20070195423
Pub Dt:
08/23/2007
Inventors:
Vladimir Kamenov, Daniel Kraehmer, Michael Totzeck, Toralf Gruner, Aurelian Dodoc et al
Title:
PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
019249/0083Recorded: 05/03/2007Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KAMENOV, VLADIMIR
Exec Dt:
04/03/2007
KRAEHMER, DANIEL
Exec Dt:
04/02/2007
TOTZECK, MICHAEL
Exec Dt:
03/30/2007
GRUNER, TORALF
Exec Dt:
04/03/2007
DODOC, DR. AURELIAN
Exec Dt:
03/30/2007
SHAFER, DAVID
Exec Dt:
04/04/2007
ULRICH, WILHELM
Exec Dt:
04/02/2007
VON BUENAU, RUDOLF
Exec Dt:
03/29/2007
MANN, HANS-JUERGEN
Exec Dt:
04/04/2007
EPPLE, ALEXANDER
Exec Dt:
04/02/2007
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
225 FRANKLIN STREET
BOSTON, MA 02110
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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