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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7480129
Issue Dt:
01/20/2009
Application #:
11221169
Filing Dt:
09/07/2005
Publication #:
20060002053
Pub Dt:
01/05/2006
Inventors:
Karl Brown, Semyon Sherstinsky, Wei W. Wang, Cheng-Hsiung Tsai, Vineet Mehta, Allen Lau et al
Title:
DETACHABLE ELECTROSTATIC CHUCK FOR SUPPORTING A SUBSTRATE IN A PROCESS CHAMBER
Assignment: 1
Reel/Frame:
016964/0370Recorded: 09/07/2005Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BROWN, KARL
Exec Dt:
08/23/2005
SHERSTINSKY, SEYMON
Exec Dt:
08/23/2005
WANG, WEI W.
Exec Dt:
08/23/2005
TSAI, CHENG-HSIUNG
Exec Dt:
09/06/2005
MEHTA, VINEET
Exec Dt:
08/24/2005
LAU, ALLEN
Exec Dt:
08/24/2005
SANSONI, STEVE
Exec Dt:
08/29/2005
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATENT COUNSEL
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CA 95052

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