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Patent Assignment Abstract of Title
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Total Assignments: 5
Patent #:
7488952
Issue Dt:
02/10/2009
Application #:
11600535
Filing Dt:
11/15/2006
Publication #:
20070194226
Pub Dt:
08/23/2007
Inventors:
Billy W. Ward, John A. Notte IV, Louis S. Farkas III, Randall G. Percival, Raymond Hill et al
Title:
ION SOURCES, SYSTEMS AND METHODS
Assignment: 1
Reel/Frame:
019286/0655Recorded: 05/11/2007Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WARD, BILLY W.
Exec Dt:
02/28/2007
NOTTE, IV, JOHN A.
Exec Dt:
02/28/2007
FARKAS, III, LOUIS S.
Exec Dt:
03/07/2007
PERCIVAL, RANDALL G.
Exec Dt:
02/28/2007
HILL, RAYMOND
Exec Dt:
02/28/2007
Assignee:
ALIS CORPORATION
10 TECHNOLOGY DRIVE
PEABODY, MASSACHUSETTS 01960
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
225 FRANKLIN STREET
BOSTON, MA 02110
Assignment: 2
Reel/Frame:
019286/0574Recorded: 05/11/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SMT AG
Exec Dt:
04/19/2007
Assignee:
ALIS CORPORATION
10 TECHNOLOGY DRIVE
PEABODY, MASSACHUSETTS 01960
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
225 FRANKLIN STREET
BOSTON, MA 02110
Assignment: 3
Reel/Frame:
019288/0561Recorded: 05/11/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
MARKWORT, LARS
Exec Dt:
04/19/2007
Assignee:
NAWOTEC GMBH
INDUSTRIESTRASSE 1
64380 ROSSDORF, GERMANY
Correspondent:
FISH & RICHARDSON PC
P.O. BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 4
Reel/Frame:
019285/0599Recorded: 05/11/2007Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ADERHOLD, DIRK
Exec Dt:
04/23/2007
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
225 FRANKLIN STREET
BOSTON, MA 02110
Assignment: 5
Reel/Frame:
022004/0770Recorded: 12/18/2008Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
NAWOTEC GMBH
Exec Dt:
12/18/2008
Assignee:
ALIS CORPORATION
10 TECHNOLOGY DRIVE
PEABODY, MASSACHUSETTS 01960
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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