Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/26/2009
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Application #:
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11160699
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Filing Dt:
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07/06/2005
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Publication #:
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Pub Dt:
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01/11/2007
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Inventors:
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Yun-Yu Wang, Christian Lavoie, Kevin E. Mello, Matthew W. Oonk, Conal E. Murray
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Title:
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METHOD OF ROOM TEMPERATURE GROWTH OF SIOX ON SILICIDE AS AN ETCH STOP LAYER FOR METAL CONTACT OPEN OF SEMICONDUCTOR DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORPORAT |
| DEPT. 18G |
| BLDG. 300-482 |
| 2070 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533 |
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