Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11748667
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Filing Dt:
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05/15/2007
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Publication #:
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Pub Dt:
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11/15/2007
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Inventors:
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Per-Erik Gustafsson, Ulric Ljungblad
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Title:
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BACKSIDE LITHOGRAPHY AND BACKSIDE IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NYTORPSVAGEN 9 |
| TABY, SWEDEN S-183 03 |
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| HAYNES BEFFEL & WOLFELD LLP/EJB |
| PO BOX 366 |
| HALF MOON BAY, CA 94019 |
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