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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7768721
Issue Dt:
08/03/2010
Application #:
12143322
Filing Dt:
06/20/2008
Publication #:
20080316621
Pub Dt:
12/25/2008
Inventors:
Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf
Title:
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJECTIVE
Assignment: 1
Reel/Frame:
021395/0574Recorded: 08/15/2008Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WEBER, JOCHEN
Exec Dt:
07/28/2008
MERZ, ERICH
Exec Dt:
08/04/2008
FLUEGGE, OLE
Exec Dt:
07/28/2008
BERROTH, KAI-UWE
Exec Dt:
07/18/2008
BUEHLER, CORNELIA
Exec Dt:
07/29/2008
HAUF, MARKUS
Exec Dt:
07/14/2008
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MICHAEL R. HAMLIN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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