Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/05/2011
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Application #:
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11918576
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Filing Dt:
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12/03/2008
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Publication #:
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Pub Dt:
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08/06/2009
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Inventor:
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Fredrik Sjostrom
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Title:
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METHOD FOR A MULTIPLE EXPOSURE BEAMS LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NYTORPSVAGEN 9 |
| TABY, SWEDEN S-183 03 |
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| ERNEST J BEFFEL, HAYNES BEFFEL & WOLFELD |
| PO BOX 366 |
| HALF MOON BAY, CA 94109 |
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