Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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11710710
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Filing Dt:
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02/26/2007
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Publication #:
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Pub Dt:
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09/06/2007
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Inventors:
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Igor Ivonin, Torbjorn Sandstrom
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Title:
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SLM LITHOGRAPHY: PRINTING TO BELOW K1=.30 WITHOUT PREVIOUS OPC PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NYTORPSVAGEN 9 |
| TABY, SWEDEN S-183 03 |
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| ERNEST J. BEFFEL |
| HAYNES BEFFEL AND WOLFELD |
| P.O.366 |
| HALF MOON BAY, CA 94019 |
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