Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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03/20/2012
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Application #:
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12720190
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Filing Dt:
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03/09/2010
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Publication #:
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Pub Dt:
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10/14/2010
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Inventors:
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Georgiy O. Vaschenko, William N. Partlo, Igor V. Fomenkov, Richard L. Sandstrom et al
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Title:
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SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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| MARTINE PENILLA & GENCARELLA, LLP |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| JEFFREY J BROOKS |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT MS/4-2D |
| SAN DIEGO, CA 92127 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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