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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8152954
Issue Dt:
04/10/2012
Application #:
11871586
Filing Dt:
10/12/2007
Publication #:
20090095424
Pub Dt:
04/16/2009
Inventors:
Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl, Duane Lytle et al
Title:
SHOWERHEAD ELECTRODE ASSEMBLIES AND PLASMA PROCESSING CHAMBERS INCORPORATING THE SAME
Assignment: 1
Reel/Frame:
019981/0199Recorded: 10/18/2007Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BETTENCOURT, GREG
Exec Dt:
10/05/2007
DHINDSA, RAJ
Exec Dt:
10/05/2007
DIERCKS, GEORGE
Exec Dt:
10/03/2007
HARDIN, RANDALL A.
Exec Dt:
10/03/2007
KEIHL, JON
Exec Dt:
10/04/2007
LYTLE, DUANE
Exec Dt:
10/04/2007
MARAKHTANOV, ALEXEI
Exec Dt:
10/05/2007
PATRICK, ROGER
Exec Dt:
10/05/2007
PEGG, JOHN
Exec Dt:
10/04/2007
SPENCER, SHANNON
Exec Dt:
10/04/2007
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538-6401
Correspondent:
DINSMORE & SHOHL LLP
ONE DAYTON CENTRE, ONE SOUTH MAIN STREET
SUITE 1300
DAYTON, OH 45402

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