Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2012
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Application #:
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12625336
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Filing Dt:
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11/24/2009
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Publication #:
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Pub Dt:
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03/18/2010
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Inventors:
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Marco Wedowski, Markus Weiss, Stephan Muellender, Johann Trenkler, Hartmut Enkisch et al
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Title:
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OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION AND AN OPTICAL SYSTEM WITH AT LEAST ONE OPTICAL ELEMENT
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Assignment:
1
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RUDOLF-EBER-STRASSE 2 |
73447 OBERKOCHEN, GERMANY |
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TIMOTHY A. FRENCH |
FISH & RICHARDSON P.C. |
ONE MARINA PARK DRIVE |
BOSTON, MASSACHUSETTS 02210-1878 |
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