Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2013
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Application #:
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12125265
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Filing Dt:
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05/22/2008
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Publication #:
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Pub Dt:
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12/25/2008
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Inventor:
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Torbjorn Sandstrom
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Title:
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METHOD AND APPARATUS FOR QUANTIFICATION OF ILLUMINATION NON-UNIFORMITY IN THE MASK PLANE OF A LITHOGRAPHIC EXPOSURE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NYTORPSVAGEN 9 |
| TABY, SWEDEN S-183 03 |
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| HAYNES BEFFEL & WOLFELD LLP |
| P O BOX 366 |
| HALF MOON BAY, CA 94019 |
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